Nanofabrication
Techniques and Principles
Author: Maria Stepanova,Steven Dew
Category: Science
Publisher: Springer
Publication date: 2011-11-08
Page count: 352
This volume updates scientists and engineers on the state of the art in various key techniques used to fabricate nanoscale structures. As well as covering lithographic creation of nano features, it focuses on new and revolutionary devices such as biosensors.
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