Nanofabrication
Techniques and Principles
Autores: Maria Stepanova,Steven Dew
Categoría: Science
Editor: Springer
Fecha de publicación: 2011-11-08
Número de páginas: 352
This volume updates scientists and engineers on the state of the art in various key techniques used to fabricate nanoscale structures. As well as covering lithographic creation of nano features, it focuses on new and revolutionary devices such as biosensors.
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